LAFOUDA Solutions

Examples of Repeatability

Sample name                          1606 S         Dom 3         R112A
Film thickness (Angstroms)              300           300           150
Substrate thickness (microns)           390           254           254
Lambda reading 1                  -1.53E-07      5.86E-07     -6.87E-08
Lambda reading 2                  -1.51E-07      6.87E-07     -7.57E-08
Lambda reading 3                  -1.54E-07      6.95E-07     -7.04E-O8
Lambda reading 4                  -1.59E-07      7.03E-07     -7.41E-08
Lambda reading 5                  -1.52E-07      6.92E-07     -7.30E-08
Lambda reading 6                  -1.55E-O7      6.89E-07     -6.71E-08
Lambda reading 7                  -1.57E-07      6.95E-07     -7.07E-08
Lambda reading 8                  -1.53E-07      6.86E-07     -7.78E-08
Lambda reading 9                  -1.51E-07      6.85E-07     -7.33E-08
Lambda reading 10                 -1.57E-07      6.82E-07     -7.08E-08
Readings average                  -1.54E-07      6.90E-07     -7.21E-08
Readings standard deviation        2.60E-09      5.95E-09      3.07E-09
Measurement Signal-to-Noise ratio      59.3         116.0          23.5